WAFER DRIER

摘要

PURPOSE: To prevent sticking of particulates or occurrence of breakdown due to electrification of a semiconductor wafer during drying in a semiconductor wafer drier. ;CONSTITUTION: An electrification quantity measuring sensor 1 to measure an electrification quantity of a wafer and an alarm device 2 are arranged in a semiconductor wafer drier, and when the electrification quantity reaches a predetermined inspection value or a danger value, an alarm is issued, and an operator is made to inspect the existence of consumption of a static electricity eliminating needle or contact failure of a high voltage cable, and the occurrence of trouble by electrification is beforehand prevented.;COPYRIGHT: (C)1995,JPO