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STRUCTURE FOR SUPPRESSION OF FIELD INVERSION CAUSED BY CHARGE BUILD-UP IN THE DIELECTRIC.
STRUCTURE FOR SUPPRESSION OF FIELD INVERSION CAUSED BY CHARGE BUILD-UP IN THE DIELECTRIC.
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机译:介质中电荷积累引起的场反转抑制结构。
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摘要
The invention relates to an integrated circuit including one or more amorphous silicon layers for neutralizing charges which occur in various dielectric layers during fabrication. The amorphous silicon layers include dangling silicon bonds which neutralize charges which would otherwise cause isolation breakdown, impair integrated circuit performance and increase manufacturing costs.
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