DC discharge plasma chemical vapor deposition diamond synthesis method

摘要

The present invention relates to a DC discharge plasma chemical vapor deposition diamond synthesis method. In the method of the present invention, the heat transfer from the cathode to the cathode suspension device is blocked by the thin cathode suspension rod, so that the temperature of the entire cathode is uniformly maintained at 2000C or more, So as to stabilize the formation of the plasma while performing the synthesis of the diamond. The present invention can stabilize the plasma by uniformly maintaining the temperature of the whole cathode above the formation temperature of the solid carbon and can prevent spalling of the surface layer of the negative electrode by carbonization of the negative electrode, There is an effect of increasing the life span.