Fabrication of Lithium Niobate (LiNbO) Directional Coupled Optical Switch with Self-Aligned Electrode Structure

摘要

The present invention relates to a method of fabricating a lithium niobate directionally coupled optical switch using self-aligned electrodes.;In the present invention, a chromium metal mask is formed on a lithium niobate substrate for proton exchange, a glass cap layer is deposited only on an optical waveguide, quantum diffusion is performed in an oxygen atmosphere, By combining the coupling length with the transition length, a cross state is obtained to fabricate an optical switch. Since a uniform delta-beta optical switch having a simple structure having a proton-exchanged optical waveguide is used in the fabrication process, an initial cross state can be easily obtained by using an annealing process, and a chromium metal mask is used as a self-aligned electrode The driving voltage can be lowered to increase the reproducibility of the production of the product.