Structure of Z-cut Lithium Niobate (Z-cut LiNbO_3) blocking type optical modulator

摘要

The present invention relates to a Z-cut LiNbO 3 (Z-cut LiNbO 3) that can be used for an integrated optical sensor for high-₃) Cutoff type optical modulator (cutoff modulator).;The optical modulator according to the present invention comprises a ground cut lithium niobate substrate, a waveguide formed in a longitudinal direction on the substrate, a SiO₂A buffer layer, a chromium electrode formed on a central portion of the buffer layer, and a ground electrode plate formed on the substrate so as to be spaced apart from the chromium electrode with a length corresponding to the buffer layer.;According to the present invention, it is possible to increase the measurement voltage range by widening the interval between the electrodes according to the applied voltage, and it is possible to optically shift the operating point of the modulator by using the annealing process And a plurality of optical voltage sensors having different measurement voltage ranges on a lithium niobate substrate can be manufactured at the same time.