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device capable of increasing the signal to noise ratio in images with secondary electrons in scanning microscopy.

机译:在扫描显微镜中能够通过二次电子提高图像中信噪比的装置。

摘要

device capable of converting electrons retrodiffusi in secondary, to acquire images of samples with a compositional contrast in scanning electron microscope.the increase of the signal obtained with this device allows maintaining the signal to noise ratio.a reduction in the diameter of the electronic probe with the increase of the resolution.it consists of a film (1) of material with a high coefficient of conversion into secondary electrons of the electron retrodiffusi.laid on a plate designed to be applied to any scanning electron microscope, below the polar piece of the lens objective.by means of an appropriate support (fig. 3b). the device can have a form to pleasure. e.g.in order to optimize the collection of secondary electrons, can reproduce the form of polar pieces in the part facing the detector.within the science of optics devoted to electron microscopes, and finds application in the field of industry of optical instruments.
机译:能够在二次电子中转换反扩散电子的设备,以在扫描电子显微镜中获取具有成分对比的样品图像。通过该设备获得的信号的增加允许维持信噪比。分辨率的提高。它由一层具有高转换成电子逆扩散性二次电子的材料的膜(1)组成,该膜放在设计用于任何扫描电子显微镜的板上,位于电子显微镜的极片下方。镜头物镜通过适当的支撑(图3b)。该设备可以具有愉悦的形式。例如,为了优化二次电子的收集,在专用于电子显微镜的光学科学领域内,可以在面对检测器的部分中再现极片的形式,并在光学仪器工业领域得到应用。

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