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DIAMOND MEMBRANES FOR X-RAY LITHOGRAPHY

机译:用于X射线光刻的钻石膜

摘要

a continuous polycrystalline diamond membrane without compressive stress with and without pin holes is produced by placing a substrate (22) arranged in a reaction chamber (100) by hot filament chemical vapor deposition, by preheating the substrate at a temperature between 400 and 650 degrees c in the presence of an inert gas.by heating the substrate at a temperature of between 650 and 700 degrees c in the presence of hydrogen and carbon compounds (61), and depositing on the substrate a polycrystalline diamond membrane by means of a chemical vapor.
机译:通过将布置在反应室(100)中的基板(22)通过热丝化学气相沉积法放置在反应室(100)中,并在400至650摄氏度之间的温度下预热基板,从而制得无压缩应力的连续多晶金刚石膜在惰性气体存在下,通过在氢和碳化合物的存在下在650至700摄氏度之间的温度下加热基材(61),并通过化学蒸汽在基材上沉积多晶金刚石膜。

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