method for producing DIAMOND MEMBRANES FOR X-RAY LITHOGRAPHY

摘要

a continuous polycrystalline diamond membrane without compressive stress with and without pin holes is produced by placing a substrate (22) arranged in a reaction chamber (100) by hot filament chemical vapor deposition, by preheating the substrate at a temperature between 400 and 650 degrees c in the presence of an inert gas.by heating the substrate at a temperature of between 650 and 700 degrees c in the presence of hydrogen and carbon compounds (61), and depositing on the substrate a polycrystalline diamond membrane by means of a chemical vapor.