Study of Diamond like Carbon as template for nanoimprint lithography and as a filler material for vertically aligned carbon nanotube forests.

摘要

Due to its tunable properties like hardness, optical gap, chemical inertness, electrical resistivity, biocompatibility etc., coatings of the material Diamond like Carbon (DLC) have been used as protective layers for various applications. In this research effort, we add to the growing list of its potential applications by proposing them as a template material for the emerging field of nanoimprint lithography. Using capacitive and inductive plasmas, we demonstrate the possibility of depositing DLC films of reasonable hardness (10-25 GPa) and wear resistance (2X that of Si and 3X that of Quartz). We have successfully used these films as a mold material to obtain feature sizes as small as 40 nm. In addition, to further the understanding of the effect of the gas phase chemistry on the film properties, the Methane discharge used for obtaining these films has been studied using techniques like Fourier Transform Infrared Spectroscopy and Optical Emission Spectroscopy. The higher degree of dissociation (up to 70%) of the precursor in case of inductive plasmas leads to selected conditions under which hard DLC films are obtained. We also show that for the same deposition conditions, films deposited on the insulating Quartz substrates are softer and more polymeric than those deposited on Si substrates.; Carbon nanotubes with their unique physical properties are seen as ideal candidates for applications like field effect transistors, supercapacitors, AFM tips and electronic devices. One of the chief challenges in using them for these applications is obtaining them in a form that is easier to handle, thus enabling them to withstand the various post-processing steps. The second part of this dissertation focuses on the possibility of obtaining a Carbon-Carbon composite structure by subjecting vertically aligned Carbon nanotube forests to a PECVD based process. The distance from the top of the CNT forest that is coated with the deposited film (termed as the depth of infusion) shows a clear dependence on the ion flux reaching the substrate surface. Additionally, the ion energies and radical densities at the substrate surface also influence the depth of infusion. Such an understanding of the infusion process is put to use in completely infusing forests as tall as 6 mum by maximizing the ion flux to the substrate surface (using a 400 W inductive plasma).