Wafer developer with wafer contamination prevention device

摘要

In this case, the photo phenomenon in semiconductor component manufacturing engineering is fairAccording to the current situation, the service buffer phenomenon of the service pollution prevention device to prevent the service rear pollution.In order to prevent the phenomenon liquid flowing from the bottom of the rotating ruler from flowing into the inside of the rotating ruler, a current guard cleaning phenomenon liquid (guard) is provided at the periphery of the rotating ruler to eliminate the pollution on the back of the suspension and maintain the cleanliness of the semiconductor molding engineering. It can not only improve the reliability of processing engineering, but also improve the production water rate.