This paper will describe the design, fabrication and testing of an on-wafer substrate that has been developed specifically for measuring extreme impedance devices using an on-wafer probe station. Such devices include Carbon Nano-Tubes (CNTs) and structures based on graphene which possess impedances in the kΩ range and are generally realised on the nano-scale rather than the micro-scale that is used for conventional on-wafer measurement. These impedances are far removed from the conventional 50 Ω reference impedance of the test equipment. The on-wafer substrate includes methods for transforming from the micro-scale to the nano-scale and reference standards to enable calibrations for extreme impedance devices. The paper includes typical results obtained from the designed wafer.
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