positive working strahlungsempfindliches mixture and strahlungsempfindliches aufzeichnungsmaterial for imaging with duv radiation

摘要

A description is given of a positive-working radiation-sensitive mixture essentially containing a photoactive component and a water-insoluble binder which is soluble, or at least swellable, in aqueous alkali solution. The mixture is characterised in that the photoactive component used is a compound containing alpha -diazo- beta -keto ester and sulphonic acid ester units of the general formula I …IMAGE… where … …  R1 and R2 are, independently of one another, an aliphatic, cycloaliphatic, araliphatic or aromatic radical containing 4 to 20 carbon atoms, in which individual CH2 groups may be replaced by oxygen or sulphur atoms or by -NR3- or -NH- groups and/or contain keto groups, …  X is an aliphatic, cycloaliphatic, carbocyclic, heterocyclic or araliphatic radical containing 2 to 22 carbon atoms, in which individual CH2 groups may be replaced by oxygen or sulphur atoms or by the groups -NR3-, -C(O)-O-, -C(O)-NR3-, …IMAGE… -NR3-C(O)-NR4-, -O-C(O)-NR3-, …IMAGE… -O-C(O)-O- or CH- groups by …IMAGE… where …  R3 and R4 are, independently of one another, hydrogen or an aliphatic, carbocyclic or araliphatic radical, …  m is an integer from 3 to 8 and …  n is an integer from 1 to 3. … …??The radiation-sensitive mixture is particularly suitable for exposure with radiation of a wavelength of 190 to 300 nm.