PROBLEM TO BE SOLVED: To make magnetic anisotropy uniform and to stabilize the formation of low-noise magnetic film formation by superposing the waveforms and phase waveform by chaos angle control on the voltage to be applied between a substrate and an electrode at the time of sputtering. ;SOLUTION: The central hole of the substrate S is engaged with the bottom end of surface wave vibrator 16 disposed in a vacuum chamber 11 and a fixing member 17 is pressed thereto from the lower side thereof to detain the substrate S. On the other hand, a specified target T is placed on the electrode 22 facing the substrate S and the inside of the vacuum chamber 11 is evacuated to and held at the specified vacuum degree. An inert gas, such as Ar is then introduced from an introducing port 11a into the chamber; thereafter, a DC or high-frequency voltage is applied between the substrate S and the electrode 22. At that time, the chaos waveforms formed by a chaos generator having the phase control and a coupler 202 are superposed on the voltage to be applied, by which sputters are generated. As a result, the thin films F having a chaos structure are obtd. on the rear side surface of the substrate S accompanied with the annealing effect by the chaos phase control.;COPYRIGHT: (C)1997,JPO
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