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FINE GOLD ALLOY WIRE FOR BUMP, AND GOLD ALLOY BUMP

机译:细金合金线的凹凸,和金合金

摘要

PROBLEM TO BE SOLVED: To provide a gold alloy bump and a fine gold alloy wire, having high reliability, for use in the formation of a stud bump used for connection of semiconductor devices. ;SOLUTION: In the gold alloy bump and the fine gold alloy wire for bump, Si is essentially contained to reduce bump height 9 and trace elements for reduction of height dispersion and improvement of joining property are further added. Moreover, Mn is incorporated by 0.005-0.8wt.% for the improvement of reliability of joining and the balance is composed of gold with inevitable impurities. Further, as elements for combined addition, 0.005-5wt.%, in total, of at least one element among Cu, Pd, and Pt (a first group), 0.0005-0.05wt.%, in total, of In, Sc, Ga, and Al, and 0.0002-0.03wt.%, in total, of Ca, Be, La, Ce, and Y are incorporated.;COPYRIGHT: (C)1997,JPO
机译:解决的问题:提供具有高可靠性的金合金凸块和细金合金线,以用于形成用于连接半导体器件的柱形凸块。 ;解决方案:在金合金凸块和用于凸块的细金合金丝中,必须包含Si以降低凸块高度9,并进一步添加微量元素以降低高度分散性并改善接合性能。此外,为了提高接合的可靠性,以0.005-0.8重量%的比例掺入了Mn,其余部分由具有不可避免的杂质的金组成。另外,作为组合添加的元素,Cu,Pd和Pt(第一组)中的至少一种元素合计为0.005〜5wt。%,In,Sc,合计为0.0005〜0.05wt。%。掺入Ga,Al,Ca,Be,La,Ce和Y的总量为0.0002-0.03wt。%;版权所有:(C)1997,日本特许厅

著录项

  • 公开/公告号JPH09272930A

    专利类型

  • 公开/公告日1997-10-21

    原文格式PDF

  • 申请/专利权人 NIPPON STEEL CORP;

    申请/专利号JP19960082888

  • 发明设计人 TATSUMI KOHEI;UNO TOMOHIRO;

    申请日1996-04-04

  • 分类号C22C5/02;H01L21/60;H01L21/321;

  • 国家 JP

  • 入库时间 2022-08-22 03:35:52

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