PIEZOELECTRIC ACTUATOR AND PYROELECTRIC TYPE INFRARED SENSOR USING THE SAME

摘要

PROBLEM TO BE SOLVED: To stabilize the drive of a laminated element type piezoelectric actuator for the use as a chopper for an infrared sensor to be driven near the resonance. ;SOLUTION: A shim 11, a displacement expander 13, a bending part 15 and a coupling part 16 are integrally constituted by bending a flat plate-like elastic material. A piezoelectric element 12 is adhered to the shim 11 to constitute a unimorph type laminating element. An angle of 0 degree to 10 degrees is provided between the expander 13 and the piezoelectric element adhered part, and a rubber material 17 is stuck to the vicinity of the part 16. As a result, two resonances are excited in excellent balance, unnecessary resonance can be reduced, and more stably drive can be conducted.;COPYRIGHT: (C)1997,JPO