PROBLEM TO BE SOLVED: To provide a drier which can prevent the occurrence of particles brought into existence by the dry process executed in one chamber. ;SOLUTION: Steam generation process is executed by providing the first chamber 20 for generation of IPA(isopropyl alcohol) vapor and the second chamber 40 for drying separately, and supplying IPA solution 21 from a supply line 22 into the first chamber 20, and heating it with a heater 22 to generate IPA vapor in the first chamber 20. Then, the dry process is executed by supplying IPA vapor into the second chamber 40 through an IPA feeder 30, when the IPA vapor pressure within the first chamber 20 comes to appropriate pressure, and performing the drying of the wafer 45 accommodated in the second chamber 40 by the IPA vapor supplied from the first chamber 20.;COPYRIGHT: (C)1997,JPO
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