Absorptance measuring method null of multilayer film reflected

摘要

PURPOSE: To provide a method for measuring the absorptivity of a multilayered reflecting film having a high reflectivity without requiring high measuring accuracy. ;CONSTITUTION: With respect to a multilayered reflecting film, spectroscopic added curves 1)-4), wherein spectroscopic reflectivity curves and spectroscopic transmittance curves are added, are formed. With respect to the sample of a multilayered reflecting film, which is constituted by the same way, spectroscopic added curves, wherein spectroscopic reflectivity curves and spectroscopic transmittances are added, are formed by the same way. Both spectroscopic added curves are noted in the low-reflectivity-wavelength region, which is located at the low wavelength side or the high wavelength side from a high reflectivity wavelength region in the vicinity of the center of the spectroscopic reflectivity curve. The inclinations, the absolute values and the shapes of the noted spectroscopic added curves are compared. Thus, the absorptivity of the multilayered reflecting film in the vicinity of the center in the high-reflectivity-wavelength region is found. This is the method for measuring the aborptivity of the multilayered reflecting film having these features.;COPYRIGHT: (C)1994,JPO&Japio