Preliminary inspection system of semiconductor manufacturing equipment

摘要

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a preliminary inspection system for semiconductor manufacturing equipment capable of informing a situation of each equipment before operation thereof in order to prevent the semiconductor manufacturing equipment from operating in a faulty state.;The present invention relates to a semiconductor manufacturing apparatus, which comprises a microcomputer connected to each electronic component constituting a semiconductor manufacturing equipment to determine the operation state thereof and to control the system according to the result, a counter for counting the operation time of each electronic component according to a control signal of the microcomputer, A display panel for externally displaying the state of each electronic component according to a control signal output from the microcomputer and a speaker for generating an alarm according to a control signal output from the microcomputer, Is improved.