首页> 外国专利> DEVICE COMPRISING TWO SUBSTRATES FOR FORMING A MICROSYSTEM OR A PART OF A MICROSYSTEM AND METHOD FOR ASSEMBLING TWO MICRO-FACTORY SUBSTRATES

DEVICE COMPRISING TWO SUBSTRATES FOR FORMING A MICROSYSTEM OR A PART OF A MICROSYSTEM AND METHOD FOR ASSEMBLING TWO MICRO-FACTORY SUBSTRATES

机译:包括用于形成微系统或微系统的一部分的两个基体的装置以及用于组装两个微基体的方法

摘要

The invention relates to a device comprising a first substrate and a second substrate intended to form a microsystem such as a sensor, at least one of the substrates may comprise electronic circuit elements. BR/ characterized in that a polymer layer is interposed between the first and second substrates, in that the polymer layer comprises at least one cavity extending from the first to the second substrate and in that the bonding means is are provided in the cavity, said welding means providing a mechanical linkage resistant to traction between the two substrates. / P
机译:本发明涉及一种装置,该装置包括旨在形成诸如传感器的微系统的第一基板和第二基板,其中至少一个基板可以包括电子电路元件。

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