ASTIGMATIC CORRECTION METHOD AND ASTIGMATIC CORRECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle optical lens barrel used in SEM, and to easily correct astigmatism with high accuracy. ;SOLUTION: A charged particle optical lens barrel has stigmata for correcting astigmatism. An astigmatic correction method of the charged particle optical lens barrel includes a first step S1 of focusing an objective lens into a secondary particle signal image obtained by extracting a secondary particle signal obtained by two-dimensionally scanning a sample with an electron beam, and also includes a second step S2 of correcting astigmatism by adjusting the stigmata to reduce the astigmatism of the electron beam with respect to the secondary particle signal image obtained in an adjusted focusing position.;COPYRIGHT: (C)1998,JPO