METHOD FOR REGULATING ANGLE OF INCLINATION OF CRYSTAL OF SINGLE-CRYSTAL SAMPLE IN MEASUREMENT OF X-RAY DIFFRACTION

摘要

PROBLEM TO BE SOLVED: To regulate the angle of inclination of crystal of a single-crystal sample accurately and quickly by changing the angle of inclination of the crystal, fitting respective peak intensities or the like of a plurality of rocking curves measured to a prescribed function curve, and using the angle of inclination of the crystal corresponding to the position of the apex thereof. ;SOLUTION: Angle α of inclination of a crystal is changed every Δα₁ and a rocking curve is measured a plurality of times for each change within an angular range of ±Δω₁ with respect to the axis ω, with a scan speed set at v₁ per minute. The peak intensity or the like of each rocking curve is plotted for the angle α of inclination of the crystal. The result of plotting is fitted to a function curve having one Gaussian or other peak value and the angle α of inclination of the crystal corresponding to the point of the apex thereof is made α₁. Next, the rocking curve is measured likewise in a plurality of times in the range of ±Δα (Δα-Δα₁/2) in the front and the rear of α₁. The respective peak intensities or the like of the rocking curves are plotted and fitted to the function curve. Regulation is conducted by using the angle α of inclination of the crystal corresponding to the position of the apex thereof.;COPYRIGHT: (C)1998,JPO