X-RAY DIFFRACTION MEASUREMENT DEVICE AND METHOD FOR DETECTING X-RAY INCIDENCE ANGLE IN X-RAY DIFFRACTION MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To detect an X-ray incidence angle relative to an object to be measured with high accuracy.;SOLUTION: An X-ray is emitted toward an object OB to be measured, and the diffraction light of the generated X-ray is received by an imaging plate 15, where the image of a diffraction ring is captured. The intensity distribution of X-ray diffraction light in the diffraction ring is detected by irradiating the image-captured diffraction ring with a laser beam from a laser detection device 30 while scanning it and detecting the intensity of generated light. A controller 91 detects, on the basis of the detected intensity distribution, a change of intensity in the circumferential direction of the diffraction ring and a change of the half peak width of the diffraction ring in the circumferential direction of the diffraction ring by arithmetic processing by a program, and detects an X-ray incidence angle from the detected changes.;COPYRIGHT: (C)2015,JPO&INPIT