CARBON ALLOTROPE WITH PSEUDO-ONE-DIMENSIONAL STRUCTURE AND PRODUCTION OF CARBON NITRIDE COMPOUND

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a carbon nitride compound capable of providing a film excellent in adhesion even on a substrate of any material by generating a pinch plasma in a flowing state of an inert gas between a gap of a pair of electrodes comprising graphite housed in a vacuum vessel, and allowing the pinch plasma to form the film of a carbon allotrope with pseudo-one-dimensional structure of the substrate. ;SOLUTION: The subject carbon allotrope is formed into a film by housing a graphite electrode 1 in the gas-blowing side connected to a gas-introducing system, and a graphite electrode 2 receiving a flow of the gas in a vacuum vessel, and generating a pinch plasma 3 in a flowing state of the rare gas (e.g. Ar) between a vacuum gap of the electrodes 1 and 2, to form the film on a substrate 35 arranged at the position facing to the plasma 3. Carbon atoms separated from the electrodes 1 and 2 by the pinch plasma 3 is irradiated as flying particles with radiation light 3A and forms the film 6 on the substrate 35. In the same way, carbon nitride is formed into the film on the substrate by generating the pinch plasma in a flowing state of N₂ gas.;COPYRIGHT: (C)1998,JPO