PROBLEM TO BE SOLVED: To cause no deviation of discharge distribution even if deviation of flow velocity distribution in piping is caused, and to cause no clogging of a discharge hole at redischarging time even if discharge is abruptly stopped. ;SOLUTION: A development nozzle 10 is provided with a diameter changing part A whose inside diameter is gradually reduced, a buffer zone B in which flow velocity energy is converted into pressure energy, a flow vector converting part C for converting the flow direction of treating liquid, and plural discharge holes 18 each in the shape of a thin tube. The width of the deviation of the flow velocity is gradually decreased in the diameter changing part A, and also inflow pressure to the buffer zone B is increased. In the buffer zone B, the deviation of the flow velocity is converted into uniform pressure distribution. In the flow vector changing converting part C, the deviation of the flow velocity is further removed. By setting the total of the sectional areas of the plural discharge holes 18 smaller than that of an inflow port, spherical bubbles are prevented from being mixed in a developer in the development nozzle 10.;COPYRIGHT: (C)1998,JPO
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