PURPOSE:To simply perform an axial matching in a short period and to conduct an axial center matching by a method wherein the position of a lifting-up needle and the vacuum nozzle of a semiconductor pellet are reflected on a monitor in which an image pickup device is used, and an axial center matching is performed on the monitor. CONSTITUTION:Semiconductor pellets 1 are arranged in an aligned state on the adhesive sheet 2 of a system mounting device, the adhesive sheet 2 is retained by a cassette ring 3, a lifting needle 6 is supported by a holder 7 located below the ring 3 in a freely slidable manner, and the needle 6 performs a vertical movement by the means A of a cam device and the like. The pellet 1 can be lifted up from the lower part of the sheet 2 when the needle 6 is operated, and the state of coincidence of the axial center (a) of a TV camera 23 and a suction nozzle 11 is indicated on a monitor 25. The axial center matching can be simply performed in a short period using the monitor 25, and the axial center can be matched accurately.
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