首页> 外国专利> SINGLE LAYER PLANAR Hg Cd Te PHOTOVOLTAIC INFRARED DETECTOR WITH HETEROSTRUCTURE PASSIVATION AND P-ON-N HOMOJUNCTION

SINGLE LAYER PLANAR Hg Cd Te PHOTOVOLTAIC INFRARED DETECTOR WITH HETEROSTRUCTURE PASSIVATION AND P-ON-N HOMOJUNCTION

机译:单层平面Hg Cd Te光伏钝化和P-on-N均化的光电红外探测器

摘要

A method for producing a photodiode with a simplified planar device architecture based on a single layer of HgCdTe using a mature, established growth technology for the sensing material, combined with an implanted homojunction which is at least partially activated during MOCVD CdTe passivation. The device architecture is based on a planar structure, a p-on-n homojunction for sensing the infrared radiation, and a CdTe or CdZnTe/HgCdTe heterostructure for passivation. The MOCVD CdTe passivation can be applied ex-situ, irrespective of the growth technology of the sensing material, and the homojunction is at least partially activated while applying the CdTe passivation. Thus, a major simplification in device architecture is achieved, based on a single layer in contrast to known, double layer heterostructures. Further, the inventive method allows application of different growth technologies for the sensing material and the passivation layer, allowing the sensing material to be supplied via the best available production techniques. Careful control of the interface properties between the passivation layer and the sensing material can be achieved. The method features a reduction in the number of production steps, and includes high-quality passivation. The production process is simplified, and features reduced cost, increased uniformity, yield, reproducibility, and high performance.
机译:一种用于制造基于单层HgCdTe的简化的平面器件架构的光电二极管的方法,该方法使用了成熟的,成熟的传感材料生长技术,并结合了在MOCVD CdTe钝化过程中至少部分被激活的注入同质结。器件架构基于平面结构,用于感测红外辐射的p-on-n同质结以及用于钝化的CdTe或C​​dZnTe / HgCdTe异质结构。不管传感材料的生长技术如何,都可以在原位施加MOCVD CdTe钝化,并且在应用CdTe钝化时,同质结至少部分被激活。因此,与已知的双层异质结构相比,基于单层实现了器件架构的主要简化。此外,本发明的方法允许将不同的生长技术应用于感测材料和钝化层,从而允许经由最佳可获得的生产技术来供应感测材料。可以仔细控制钝化层和传感材料之间的界面特性。该方法的特征在于减少了生产步骤的数量,并且包括高质量的钝化。生产过程得以简化,并具有降低成本,提高均匀性,产量,可重复性和高性能的特点。

著录项

  • 公开/公告号IL108589A

    专利类型

  • 公开/公告日1998-06-15

    原文格式PDF

  • 申请/专利权人 TECHNION RESEARCH & DEVELOPMENT FOUNDATION LTD.;

    申请/专利号IL19940108589

  • 发明设计人 YAEL NEMIROVSKY;

    申请日1994-02-08

  • 分类号H01L31/0296;H01L31/101;H01L21/328;

  • 国家 IL

  • 入库时间 2022-08-22 02:57:43

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