DISPERSION TYPE MULTI-TEMPERATURE CONTROL SYSTEM AND FLUID TEMPERATURE CONTROL DEVICE APPLICABLE TO THE SYSTEM

摘要

A fluid temperature control device is improved so as to be simple in construction, to provide a uniform fluid temperature and to heat even a fluid having a low light absorption rate. A fluid temperature control device includes a tubular inside container (20), a tubular outside container (22) surrounding the inside container (20), and a heating lamp (25) inserted into the inside container (20). Metallic fins (28a, 28b) are provided on inner and outer circumferential surfaces of the inside container (20) in such a manner as to erect from the surfaces, respectively. Working fluid is caused to flow in a flow path (21) between the inside container (20) and the heating lamp (25) and cooling water in a flow path (23) between the inside container (20) and the outside container (22). Infrared rays from the heating lamp (25) heat the working fluid and heat absorption into the cooling water cools the working fluid. This fluid temperature control device is used to control the temperatures of a plurality of process chambers equipped on, for instance, a reaction processing device. A plurality of the temperature control devices are disposed near the reaction processing device. Each temperature control device is exclusively assigned to each of a plurality of portions of the process chamber. Each temperature control device supplies the temperature-controlled working fluid to each portion of the process chamber.