A REMOVING APARATUS OF AN OXIDE FILM ON THE SURFACE OF THE COPPER LEAD FRAME AND REMOVING METHOD OF OXIDE FILM

摘要

The present invention provides a heat source generator having a plurality of first inlets and a plurality of first injection holes, a heat shield, a plurality of second inlets, and a plurality of second injections to prevent the surface of the copper lead frame from being oxidized. The oxide film removing device and the lead frame conveyed along the guide rail are conveyed into the heat source generator, and the cooling device having a hole is symmetrically around the guide rail of the lead frame. After the mixed gas injected into the inlet is heated and sprayed on the surface of the lead frame through the first injection hole, passes through the heat shield device along the guide rail, and then is transferred to the inside of the cooling device, and the second of the cooling device. Oxidation is carried out after the cold fluorinated mixed gas injected into the inlet is sprayed onto the surface of the transferred lead frame through the second injection hole of the cooling device. By providing a removing method, and at the same time to remove the oxide film has the effect of creating a nitride film can be prevented from being re-oxidized.