Optical deflector with piezoelectric drive or positioning element

摘要

The optical deflector has a piezoelectric drive or control element contg. at least one vibrator (1) of piezoelectric ceramic or applied piezoelectric stimulators and a carrying part. The vibrator is mounted on a holder (2). The vibrators and vibrator holders are designed so that the end faces (3) of the holders perform a tilting motion through a predefined angle. A beam deflecting optical element (4) is mounted on the end surface or the end surface is itself optically deflecting and the vibration holder is attached to the carrying part by spring bearings, esp. a flexible spring linkage.