OPTICAL DEVICE USING SYNCHROTRON EMITTED LIGHT, X-RAY MICROSCOPE USING SUCH DEVICE AND X-RAY EXPOSURE SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an optical device where synchrotron emitted light is used to always obtain a highly strong X-ray beam in an irradiated section by detecting a relatively variable angle between a light-emitting point in a light source of synchrotron emitted light and the optical device and correcting the angle. ;SOLUTION: An X-ray beam 4 radiated from a light source 3 of a synchrotron emitted light is reflected by a condensing mirror 5 and is condensed in the position of a sample 7. After the beam 4 passes through the sample 7, an image is formed in an X-ray detector 9 by a Schwarzschild projection optics system 8. The X-ray beam 4 that passes through a hole in the center of the condensing mirror 5 is incident on an X-ray angle detector 6 to measure the angle with an angle displacement arithmetic circuit 10. The angle of the X-ray beam 4 can be corrected by driving a surface plate 13 with a stage drive mechanism 12 of a stage 11.;COPYRIGHT: (C)1999,JPO