CD PLASMA CVD DEVICE FOR DLC FILM FORMATION AND FORMATION OF DLC FILM

摘要

PROBLEM TO BE SOLVED: To provide a DC plasma CVD device capable of forming DLC film on an insulated film and to provide a DC plasma CVD film forming method of DLC film. ;SOLUTION: As for a DC plasma CVD device 10, the inside of a reaction tube 18 is provided with a pair of cathode electrode 16 and anode electrode 20 respectively connected to a DC power source 22, and DC glow discharge is generated on the space between the electrodes to form diamondlike carbon(DLC) film on an insulated substrate. The cathode electrode 16 has an electrode face wider than the substrate face in the insulated substrate, and the anode electrode 20 has an electrode face wider than the substrate face in the insulated substrate by double or above.;COPYRIGHT: (C)1999,JPO