SAMPLE CROSS-SECTION OBSERVING METHOD IN FIB-SEM DEVICE AND FIB-SEM DEVICE

摘要

PROBLEM TO BE SOLVED: To realize a sample cross-section observing method in a FIB(focused ion beam)-SEM(inline-type scanning electron microscope) device and the FIB- SEM device, enabling a sample worked by a FIB to be observed with sufficient contrast with good resolution, and without taking it out of the device, by a scanning electron microscope. ;SOLUTION: An ion beam is generated from an ion gun 3 in a FIB column 1, and a sample 7 is worked by applying the ion beam to the sample. After an opening is formed by the work, a stage 18 is 180° rotated, and further, the stage 18 is inclined greatly. By the rotation and inclination of the stage 18, a cross-section part D of the opening 20 of the sample 7 can be caused to face the FIB column 1. In this state, the amount of current of the ion beam applied to the sample 7 is reduced. As a result, a cross-section surface layer can be worked longitudinally on the order of nm at the cross-section part to be worked of the sample. After such surface treatment is conducted, a SEM image of the worked cross-section part of the sample is observed.;COPYRIGHT: (C)1999,JPO