PROCESSING METHOD FOR SAMPLE IN FIB-SEM DEVICE AND FIB-SEM DEVICE

摘要

PROBLEM TO BE SOLVED: To accurately and easily perform processing up to the center of a defective part, etc. ;SOLUTION: A method for processing a sample in a FIB(focused ion beam)- SEM(scanning electron microscope) device includes forming an opening in the sample 7, obtaining a scanning electron microscope image of a cross-sectional part on a cathode-ray tube 17, and under this state controlling a track ball 22 to determine defective parts or the end positions of a contact hole in the image. Thereafter, an ion beam is applied to the sample 7 to process the sample, and a scanning electron microscope image is acquired as the processing is effected. A function processing unit 36, based on this image signal, measures the distance between the defective parts or the end positions of the contact hole. The processing using the ion beam is stopped when a change in the distance becomes almost zero.;COPYRIGHT: (C)1999,JPO