WAFER COUNTER WITH FUNCTION FOR DETECTION WAFER BEING IMPROPERLY MOUNTED TO SLOT AND WAFER COUNT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a wafer counter where an improper mounting detection means in that the width of a slot is further reduced and depth for forming the slot is further deepened is added, and a wafer count method using the wafer counter. SOLUTION: A wafer improper amounting detection means finds a wafer 102 being improperly mounted in advance for correcting before counting the wafer 102. The wafer improper mounting detection means is composed of the body of a wafer counter 108 and a slot section plate side part. Also, the means is composed of the quality of material that gives no impact to the wafer 102 when the means is brought into contact with the wafer 102, thus suppressing contamination, the lowering of yield, and operation down caused by allowing the wafer 102 to fall into the apparatus.