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MANUFACTURE OF FLIP CHIP MOUNTING SOLDER BUMP OF SEMICONDUCTOR DEVICE AND SOLDER BUMP MANUFACTURED BY THE SAME METHOD AND METHOD FOR ANALYZING THE SAME
MANUFACTURE OF FLIP CHIP MOUNTING SOLDER BUMP OF SEMICONDUCTOR DEVICE AND SOLDER BUMP MANUFACTURED BY THE SAME METHOD AND METHOD FOR ANALYZING THE SAME
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机译:半导体器件的倒装芯片焊点的制造以及通过相同方法制造的焊点和相同方法的分析方法
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摘要
PROBLEM TO BE SOLVED: To provide a method for manufacturing a flip chip mounting solder bump for a semiconductor device for using an alloy of silver and tin for the solder bump, and the solder bump manufactured by this method, and a method for analyzing this. SOLUTION: In a method for manufacturing the flip chip mounting solder bump for a semiconductor device to be mounted on a circuit board, on which a pattern has already been formed according to the characteristics of an element, a boundary film 14 is formed (1), a photo process is operated (2), silver 18 and tin 20 are plated successively on a region from which a photoresist is removed in the photo process (3), the photoresist is completely removed (4), the etching of the boundary film 14 is carried out (5), a reflow process is operated, and the silver 18 and the tin 20 successively formed by plating is mixed with a prescribed ratio so as to be turned into alloy (6).
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