PROBLEM TO BE SOLVED: To perform observation in good reproducibility and at spacial resolu tion up to nano-meter order. ;SOLUTION: Minute projections 11 smaller than the wavelength of light are disposed on the light wave-guide of an traveling wave type optical ring resonator using the light wave-guide or an optical fiber, on the side of the optical fiber or on a mirror face opposite to the specimen of the travelling wave type optical ring resonator using three or more mirrors. When the minute projection 11 is opposed to the specimen as a probe, which is approached, feed- back control of a distance between the probe and the specimen is performed so that back-scattering occurring in the optical ring resonator is made constant or the resonant frequency of the optical ring resonator or the shape of a resonant curve is made constant.;COPYRIGHT: (C)1999,JPO
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