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Probe and method for manufacturing the probe for use in scanning near-field optical / atomic microscope and scanning near-field optical nuclear microscope
Probe and method for manufacturing the probe for use in scanning near-field optical / atomic microscope and scanning near-field optical nuclear microscope
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机译:用于扫描近场光学/原子显微镜和扫描近场光学核显微镜的探针和制造该探针的方法
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摘要
A device capable of measuring the microstructure and optical properties of the surface of a sample with high resolution regardless of the sample's transmittance and conductivity is realized. The apparatus includes a probe, a light source for irradiating a sample with light, a photoelectric conversion device and optics for receiving light reflected by the sample or light transmitted through the sample, laser emission laser light for the probe to detect deflection, and laser light. A condensing lens for directing to the back surface of the probe, a detection system for detecting reflected light, a coarse and fine operating mechanism for moving the sample and the probe in proportion to each other, and control means for controlling the distance between the sample and the probe; It consists of a computer that controls the entire device. The probe has a front end and a light propagating body connected to the front end, and the front end and the light propagating body are annular. The device observes the microstructure and optical properties of the sample surface.
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