Operation of a scanning near-field optical microscope in reflection in combination with a scanning force microscope

摘要

Images obtained with a scanning near field optical microscope (SNOM) operating in reflection are presented. We have obtained the first results with a SiN tip as optical probe. The instrument is simultaneously operated as a scanning force microscope (SFM). Moreover, the instrument incorporates an inverted light microscope (LM) for preselection of a scan area. The SiN probe is operated in the contact regime causing a highly improved lateral resolution in the optical image compared to an alternative set-up using a fiber probe, which is also presented. The combined microscope is operated either in open loop or as a force regulated SNOM. Near field optical images can be directly compared with the topography displayed in the simultaneously recorded SFM image.