Apparatus for and method of cleaning objects to be processed

摘要

A cleaning apparatus and a cleaning method for cleaning an object (W) are provided. In the cleaning apparatus, a drying chamber (42) and a cleaning bath (41) are separated from each other up and down, respectively. Thus, a space in the drying chamber (42) can be insulated from a space of the cleaning bath (41) through rotary doors (59a) and a slide door (72). In the cleaning method, a cleaning process in the cleaning bath (41) is carried out while sealing it by the rotary doors (59a). On the other hand, a drying process in the drying chamber (42) is accomplished while sealing and closing it by the slide door (72). Consequently, there is no possibility that, during the drying process, the object is subjected to a bad influence from a chemical treatment.