System for ultra-pure chemical dilution used in microelectronic devices industry

摘要

The present invention relates to a system for ultra-pure chemical dilution intended for use in the microelectronic device industry. For this purpose, a concentrated chemical having a predetermined concentration P suitable for the purity required for the microelectronic industry is diluted by supplying water whose purity is at least equal to P, and the appropriate concentration of the solution (the appropriate concentration) A sample of the diluted chemical is withdrawn to check for the purity of the diluted chemical, which is then adjusted, preferably by recirculating the diluted chemical, within a suitable concentration.