ULTRA-PURE CHEMICAL DILUTION SYSTEM FOR THE MICROELECTRONIC INDUSTRY

摘要

The present invention relates to a system for diluting ultra-pure chemicals intended for use in the microelectronics industry. For this purpose, a concentrated chemical is diluted with a predetermined purity P compatible with the purity required in the microelectronic industry with a source of water of purity at least equal to P and an adjustment is made to the titer of the solution. by recirculation of the diluted product inside the dilution container, preferably, a sample of the diluted product is then taken in order to control the purity of the diluted product whose titer has been previously checked.