Piping purge device of semiconductor device manufacturing equipment and its purging method and cleaning method of manufacturing equipment using these purge device and purging method

摘要

The present invention relates to a pipe purging device and a purge method of a semiconductor device manufacturing facility for preventing air, including particles and the like, from entering the piping of the manufacturing facility during maintenance, repair and cleaning of the semiconductor device manufacturing facility used in the manufacture of the semiconductor device. And a cleaning method of a manufacturing facility using these purge apparatuses and purge methods.;The pipe purge device of the semiconductor device manufacturing equipment according to the present invention includes a gas pipe 11, a mixing chamber 15, a reaction chamber 16 through which etching or deposition proceeds, a load lock chamber 17, and a main control valve 18. And at least one purge gas pipe 21 directly connected to the gas pipes 11, thereby purging the purge gas. Supplying the gas pipe 11 into the gas pipe 11 prevents the air containing particles and the like from entering the gas pipe 11 opened at atmospheric pressure, thereby preventing contamination of the gas pipe 11.