Gas piping system for manufacturing device of electronic material and method to prevent flowing backward of purge gas in the gas piping system

摘要

The present invention is to prevent reverse flow of purge gas from the gas pipe system and a system for an electronic material production apparatus relates to a method , and a process gas supply valve for controlling the process gas , the reverse flow of the process gas process gas toward the inlet valve when the valve as well as supplying the process gas to the chamber at a constant pressure in the high pressure chamber side flowing through the and a regulator to prevent , is configured to include a purge gas supply control valve for a purge gas between the chamber and the output side of the regulator . The present invention configured as described above has the effect of preventing the reverse flow of purge gas to prevent contamination of the entire pipe If the inlet pressure and the purge using the set pressure difference between the regulator and the gas of the purge gas at the same time the process gas inlet .