Circuit of wafer flat zone detection device and wafer flat zone detection device

摘要

The wafer flat zone detection apparatus arranges the light emitting elements and the light receiving elements according to the diameter of the wafer to be detected. That is, the circuit board is set to detect flat zones of wafers having diameters of 4 inches, 5 inches, and 6 inches. Such a wafer flat zone detection apparatus includes a first substrate and light emitting devices each having light emitting devices installed at a predetermined interval successively from one end, and having a circuit electrically connected to the wafer test system, and electrically connected to the wafer test system. And a second substrate positioned to face one surface of the first substrate at a predetermined distance. The light emitting elements are turned on or off by a dip switch provided on the first substrate. Therefore, the wafer flat zone detection apparatus of the present invention adjusts the dip switch to detect the flat zone of the wafer being tested in the wafer test system. The circuit of the wafer flat zone detection apparatus is such that the light receiving elements are connected in parallel and electrically connected to the wafer test system, and one line of light emitting elements is connected in parallel and electrically connected to the wafer test system. The lines are connected to each terminal of the dip switch so that the electrical connection between the dip switch and the wafer test system is connected in one line.