Wafer flat zone aligner with semiconductor wafer damage detection means and wafer damage detection method using the same

摘要

A flat zone aligner is disclosed that can align flat zones of a wafer while detecting damages occurring at the wafer edges.;The present invention relates to a wafer flat zone aligner in which a plurality of semiconductor wafers are vertically arranged at regular intervals on a pair of rollers installed parallel to an upper surface of a carrier, and then the wafers are rotated to align the flat zones of the wafers. Damage detection means for detecting whether the edge of the wafer is damaged in a predetermined position adjacent to is configured to be installed.;Therefore, the damage of the wafer is accurately detected along with the flat zone alignment of the wafer, thereby preventing damage to other wafers in advance, thereby improving productivity.