Epitaxial layer transfer to an alternative substrate e.g. of glass, plastic or ceramic

摘要

Layer transfer from one substrate to another is carried out by anodizing to form a porous frangible layer (2), applying an epitaxial layer (4) and then detaching the epitaxial layer for transfer to another substrate. Layers are transferred from one substrate to another by: (a) anodizing in hydrofluoric acid to form a porous frangible layer (2), optionally below a stabilizing layer of lower porosity; (b) briefly contacting the layer with HF to remove oxide; (c) applying an epitaxial layer (4); (d) detaching the epitaxial layer and the optional stabilizing layer from the substrate (1) for transfer to another substrate; and (e) optionally removing the stabilizing layer and/or residues of the frangible layer from the epitaxial layer. Preferred Features: The initial substrate and the starting material for the frangible and stabilizing layers consist of p-doped Si, SiC and/or Ge.