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Sensitivity calibration disk for surface defect tester

机译:表面缺陷测试仪灵敏度校准盘

摘要

A calibration disk for calibrating a sensitivity of a surface defect tester, according to the present invention, comprises n (n is an integer equal to or larger than 2) false defect rows each including 3 or more false defects each formed in a radial or peripheral direction provided in the peripheral direction of the calibration disk at a predetermined angle pitch. The false defects of each false defect row take in the form of protrusions or recesses having substantially the same size, adjacent ones of the false defects are physically separated by a predetermined distance larger than a width of a laser spot and the false defects of a certain one of the false defect rows are different in size from the false defects of other false defect rows.
机译:根据本发明,用于校准表面缺陷测试仪的灵敏度的校准盘包括n个(n是等于或大于2的整数)假缺陷行,每个假缺陷行包括3个或更多个在径向或外围形成的假缺陷。在校准盘的圆周方向上以预定角度间​​距设置的方向。每个假缺陷行的假缺陷采取具有基本相同大小的凸起或凹进的形式,相邻的假缺陷在物理上隔开预定距离,该预定距离大于激光点的宽度,并且一定距离的假缺陷错误缺陷行之一的大小与其他错误缺陷行的错误缺陷的大小不同。

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