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Device for producing a single crystal

机译:用于生产单晶的装置

摘要

A novel device for producing a single crystal by the CZ or MCZ method is provided, which comprising a crucible for containing silicon melt therein, a wire reel and a wire for pulling a single crystal, a motor and a rotation shaft for rotating the crucible, a speed change device being inserted between the motor and the rotation shaft, and, if necessary, a magnetic field generator, by which the magnetic field is applied to the melt. According to the device for producing a single crystal, the rotation accuracy of a crucible can be improved, so that the concentrations of impurities in the pulled single crystal can be highly precisely controlled.
机译:提供了一种通过CZ或MCZ方法生产单晶的新颖装置,其包括:用于在其中容纳硅熔体的坩埚,绕线轮和用于拉动单晶的线;电动机和用于旋转坩埚的旋转轴,在电动机和旋转轴之间插入有一个变速装置,必要时还有一个磁场发生器,通过该磁场发生器将磁场施加到熔体上。根据该单晶制造装置,由于可以提高坩埚的旋转精度,所以可以高精度地控制拉晶单晶中的杂质浓度。

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