Scanning probe microscope and micro-area processing machine both having micro-positioning mechanism

摘要

A scanning probe microscope has a probe for measuring the shape of a sample surface and various physical properties of the sample, and a micro- positioning mechanism for positioning the sample proximate the probe. The micro-positioning mechanism has spring elements for effecting fine movement of the sample in a predetermined direction toward the probe, an electromagnetic power generating mechanism for driving the spring elements, a support mechanism mounted for movement in the predetermined direction and having a support member supported through a viscous element for effecting coarse movement of the sample in the predetermined direction, and a heating mechanism for heating the viscous element.