The object is to investigate the wear of an atomic force microscope (AFM) diamond tip when conducting micro/nano machining on single crystal silicon surface. The experimental research and theoretical analysis were carried out on the worn tip in terms of wear rate, wear mechanism and the effect of the tip wear on micro machining process. The wear rate was calculated as 1.7(10～10mm 3/(N·m) by using a theoretical model combined with the experimental results. Through an integration of an AFM observation on the worn tip features with the FEM simulation of the stress distribution, in addition to the unit cutting force calculation on the AFM diamond tip, the wear mechanism of the AFM diamond tip was concluded as mainly chemical wear, and the wear process was also elaborated as well.
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